![PDF] Low temperature Pyrex/silicon wafer bonding via a single intermediate parylene layer | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/f7c4f3c953df66d6f3dfca4eb449feccc5791d55/2-Figure1-1.png "PDF] Low temperature Pyrex/silicon wafer bonding via a single intermediate parylene layer | Semantic Scholar")
PDF] Low temperature Pyrex/silicon wafer bonding via a single intermediate parylene layer | Semantic Scholar
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a) A quarter InP wafer bonded on a Pyrex glass wafer using a 50 nm... | Download Scientific Diagram
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Schematic process flow. All substrates are 100-mm Pyrex wafers with a... | Download Scientific Diagram
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a) Microliter cavities fabricated on a 4 inch Pyrex wafer, (b) one... | Download Scientific Diagram
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Pyrex glass wafer etched-through in a 49% HF solution using a ␣... | Download Scientific Diagram
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2: Wafer-level process on Pyrex wafer: (a) Deposition of first... | Download Scientific Diagram
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